L.S.,
We have a Lumonics EX-700 Pulsemaster excimer laser that we have operated in recent years on ArF, and a Lumonics EPG 1100 gas processor. Since some time the excimer laser does not work anymore. Our diagnosis is that the discharge is not good anymore -and most probably because the preionisation pins are not good anymore-, and that the electrodes have reached the end of their lifetime. Because the laser is not serviced anymore, we have come to the conclusion that we cannot maintain the laser anymore.
If you are interested in the laser and/or gas processor -for example, because of spare parts or so-, you are most welcome to have it as long as you take care of the transport to your lab.
Sincerely yours,
Wybren Jan Buma
Prof. dr W.J.Buma
University of Amsterdam
Van 't Hoff Institute for Molecular Sciences
Science Park 904
1098 XH Amsterdam
P.O. Box 94157
1090 GD Amsterdam
The Netherlands
Tel. +31-20-525 6973
http://home.medewerker.uva.nl/w.j.buma/
http://www.science.uva.nl/research/molphot/
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