Does anyone have any experience with low gas flow (sub-microliter to ~100 microliters per minute) controllers operating at pressures of roughly a few atmospheres? We're looking for something that can handle corrosive gases, specifically ozone, but any information at this point would be helpful. Any ideas for manufacturers? All the products I can find on the web seem to deal with a few hundred microliters/minute and upwards.
Thanks,
-Alan Maccarone
Postdoctoral Researcher
S.J. Blanksby Mass Spec Group
University of Wollongong Chemistry Dept.
Wollongong, NSW 2522
Australia
+61 2 4221 5451
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