Hi,
We have a Lumonics EX-700 excimer laser operating on ArF. The documentation
of this laser gives a gas mixture that is based on balancing with Ne. Does
anybody have experience with a gas mixture that is based one balancing with
He ? I would be much obliged to hear about the appropriate mixture, and
experiences with stability, gas life time etc.
Thanks very much !
Wybren Jan Buma
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